2000-2005

Click here to get pdf files for these publications (internal EMAT user only)

 

 

 

 

 

 

 

 

  • J. Michel, J. F. Liu, W. Giziewicz, D. Pan, K. Wada, D. D. Cannon, S. Jongthammanurak, D. T. Danielson, L. C. Kimerling, J. Chen, F. O. Ilday, F. X. Kartner and J. Yasaitis, "High performance Ge p-i-n photodetectors on Si," 2005 2nd IEEE International Conference on Group IV Photonics(2005).

 

 

 

  • J. F. Liu,
    D. D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. T. Danielson, J.
    Michel and L. C. Kimerling, "Tensile strained Ge p-i-n photodetectors on
    Si platform for C and L band telecommunications," Appl. Phys. Lett., 87 1
    (2005).

 

  • K. K. Lee,
    D. R. Lim, D. Pan, C. Hoepfner, W. Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap
    and M. T. Doan, "Mode transformer for miniaturized optical circuits,"
    Optics Letters, 30 5 (2005).

 

  • Y. Ishikawa,
    K. Wada, J. F. Liu, D. D. Cannon, H. C. Luan, J. Michel and L. C. Kimerling,
    "Strain-induced enhancement of near-infrared absorption in Ge epitaxial
    layers grown on Si substrate," Journal
    of Applied Physics, 98 1 (2005).

 

  • F. J.
    Grawert, J. T. Gopinath, F. O. Ilday, H. M. Shen, E. P. Ippen, F. X. Kartner,
    S. Akiyama, J. Liu, K. Wada and L. C. Kimerling, "220-fs erbium-ytterbium
    : glass laser mode locked by a broadband low-loss silicon/germanium saturable
    absorber," Optics Letters, 30 3 (2005).

 

  • O. I.
    Dosunmu, D. D. Cannon, M. K. Emsley, L. C. Kimerling and M. S. Unlu, "High-speed
    resonant cavity enhanced Ge photodetectors on reflecting Si substrates for
    1550-nm operation," Ieee Photonics
    Technology Letters, 17 1 (2005).

 

  • L. Dal
    Negro, J. H. Yi, M. Stolfi, J. Michel, J. LeBlanc, J. Haavisto and L. C.
    Kimerling, "Light emitting silicon nanostructures," Ieee International Electron Devices Meeting
    2005, Technical Digest, (2005).

 

  • L. Dal
    Negro, J. H. Yi, V. Nguyen, Y. Yi, J. Michel and L. C. Kimerling,
    "Spectrally enhanced light emission from aperiodic photonic
    structures," Appl. Phys. Lett.,
    86 (2005).

 

  • L. Dal
    Negro, J. H. Yi, V. Nguyen, Y. Yi, J. Michel and L. C. Kimerling, "Light
    emission in aperiodic Thue-Morse dielectrics," Group-IV Semiconductor Nanostructures, 832 (2005).

 

  • L. Dal
    Negro, M. Stolfi, J. Michel, J. Le Blanc, J. Haavisto and L. C. Kimerling,
    "Energy sensitization in erbium-doped silicon-rich oxide films annealed at
    low temperatures," 2005 2nd IEEE
    International Conference on Group IV Photonics, (2005).

 

  • S. Akiyama,
    M. A. Popovic, P. T. Rakich, K. Wada, E. Michel, H. A. Haus, E. P. Ippen and L.
    C. Kimerling, "Air trench bends and splitters for dense optical
    integration in low index contrast," Journal
    of Lightwave Technology, 23 7
    (2005).

 

  • S. Akiyama,
    F. J. Grawert, J. Liu, K. Wada, G. K. Celler, L. C. Kimerling and F. X.
    Kaertner, "Fabrication of highly reflecting epitaxy-ready Si-SiO2 Bragg
    reflectors," Ieee Photonics
    Technology Letters, 17 7 (2005).

 

  • Y. S. Yi, J.
    G. Sandland, S. Akiyama, X. M. Duan and L. C. Kimerling, "Prism coupling
    to on-chip silicon based bragg cladding waveguide," Appl. Phys. Lett., 85 16
    (2004).

 

  • Y. Yi, S.
    Akiyama, X. M. Duan and L. C. Kimerling, "Development of new Si-based
    waveguide: Photonic crystal cladded waveguide," 2004 Ist Ieee International Conference on Group Iv Photonics,
    (2004).

 

  • Y. Yi, S.
    Akiyama, P. Bermel, X. M. Duan and L. C. Kimerling, "On-chip Si-based
    Bragg cladding waveguide with high index contrast bilayers," Optics Express, 12 20 (2004).

 

  • A. Yamada,
    A. Fujiwara and Y. Matsumoto, "Enhancement of mesh network oriented
    IEEE802.11 MAC protocol," 2004 Joint
    Conference of the 10th Asia-Pacific Conference on Communications and the 5th
    International Symposium on Multi-Dimensional Mobile Communications, Vols 1 and
    2, Proceedings, (2004).

 

  • A. W. Wong,
    P. T. Rakich, S. G. Johnson, M. H. Qi, H. I. Smith, Y. Jeon, G. Barbastathis,
    S. G. Kim, E. P. Ippen and L. C. Kimerling, "Strain-tunable silicon
    photonic band gap microcavities in optical waveguides," Appl. Phys. Lett., 84 8 (2004).

 

  • A.W. Wong,
    P. T. Rakich, S. G. Johnson, M. H. Qi, H. I. Smith, E. P. Ippen, L. C.
    Kimerling, Y. B. Jeon, G. Barbastathis and S. G. Kim, "Strain-tunable
    silicon photonic band gap microcavities in optical waveguides (vol 84, pg 1242,
    2004)," Appl. Phys. Lett.,
    84 15 (2004).

 

  • K. Wada, J.
    F. Liu, S. Jongthammanurak, D. D. Cannon, D. T. Danielson, Y. Ishikawa, A.
    Eshed, C. Y. Hong, J. Michel and L. C. Kimerling, "Direct integration of
    ge detectors and modulators on the Si microphotonics platform," 2004 Ist Ieee International Conference on
    Group Iv Photonics, (2004).

 

  • S. Saini, J.
    G. Sandland, A. Eshed, D. K. Sparacin, L. Dal Negro, J. Michel and L. C.
    Kimerling, "A high index contrast silicon oxynitride materials platform
    for Er-doped microphotonic amplifiers," New Materials for Microphotonics, 817 (2004).

 

  • S. Saini, K.
    Chen, X. M. Duan, J. Michel, L. C. Kimerling and M. Lipson, "Er2O3 for
    high-gain waveguide amplifiers," Journal
    of Electronic Materials, 33 7
    (2004).

 

  • J. F. Liu, J.
    Michel, W. Giziewicz, D. D. Cannon, S. Jongthammanurak, D. T. Danielson, D.
    Pan, J. Yasaitis, K. Wada and L. C. Kimerling, "A 20GHz, tensile strained
    Ge photodetector on Si platform with broad detection spectrum for optical
    communications and on-chip applications," 2004 Ieee Leos Annual Meeting Conference Proceedings, Vols 1 and 2,
    (2004).

 

  • J. F. Liu,
    D. D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. T. Danielson, J.
    Michel and L. C. Kimerling, "Silicidation-induced band gap shrinkage in Ge
    epitaxial films on Si," Applied
    Physics Letters, 84 5 (2004).

 

  • J. F. Liu,
    D. D. Cannon, K. Wada, Y. Ishikawa, D. T. Danielson, S. Jongthammanurak, J.
    Michel and L. C. Kimerling, "Deformation potential constants of biaxially
    tensile stressed Ge epitaxial films on Si(100)," Physical Review B, 70 15
    (2004).

 

  • L. C.
    Kimerling, L. Dal Negro, S. Saini, Y. Yi, D. Ahn, S. Akiyama, D. Cannon, J.
    Liu, J. G. Sandland, D. Sparacin, J. Michel, K. Wada and M. R. Watts,
    "Monolithic Silicon Microphotonics," Silicon Photonics, 94 (2004).

 

  • F. J.
    Grawert, S. Akiyama, J. T. Gopinath, F. O. Ilday, J. Liu, H. Shen, K. Wada, L.
    C. Kimerling, E. P. Ippen and F. X. Kaertner, "Silicon-germanium saturable
    absorber mirrors," 2004 Ieee Leos
    Annual Meeting Conference Proceedings, Vols 1 and 2, (2004).

 

  • O. I.
    Dosunmu, M. K. Emsley, M. S. Unlu, D. D. Cannon and L. C. Kimerling, "High
    speed resonant cavity enhanced ge photodetectors on si reflecting substrates
    for 1550 nm operation," 2004 Ieee
    International Topical Meeting on Microwave Photonics, Technical Digest,
    (2004).

 

  • O. I.
    Dosunmu, D. D. Cannon, M. K. Emsley, L. C. Kimerling and M. S. Unlu, "High
    speed resonant cavity enhanced Ge photodetectors on reflecting Si substrates
    for 1550 nm operation," 2004 Ieee Leos Annual Meeting Conference Proceedings,
    Vols 1 and 2, 148-149 (2004).

 

  • O. I.
    Dosunmu, D. D. Cannon, M. K. Emsley, B. Ghyselen, J. F. Liu, L. C. Kimerling
    and M. S. Unlu, "Resonant cavity enhanced Ge photodetectors for 1550 nm
    operation on reflecting Si substrates," Ieee Journal of Selected Topics in Quantum Electronics, 10 4 (2004).

 

 

  • L. Dal
    Negro, M. Stolfi, Y. Yi, J. Michel, X. Duan, L. C. Kimerling, J. LeBlanc and J.
    Haavisto, "Photon band gap properties and omnidirectional reflectance in
    Si/SiO2 Thue-Morse quasicrystals," Applied
    Physics Letters, 84 25 (2004).

 

  • L. Dal
    Negro, M. Stolfi, Y. Yi, J. Michel, X. Duan, L. C. Kimerling, J. Leblanc and J.
    Haavisto, "Omnidirectional reflectance and optical gap properties of
    Si/SiO2 Thue-Morse quasicrystals," New
    Materials for Microphotonics, 817 (2004).

 

  • D. D.
    Cannon, J. F. Liu, Y. Ishikawa, K. Wada, D. T. Danielson, S. Jongthammanurak,
    J. Michel and L. C. Kimerling, "Tensile strained epitaxial Ge films on
    Si(100) substrates with potential application in L-band
    telecommunications," Applied Physics
    Letters, 84 6 (2004).

 

 

  • G. Taraschi,
    S. Saini, W. W. Fan, L. C. Kimerling and E. A. Fitzgerald, "Nanostructure
    and infrared photoluminescence of nanocrystalline Ge formed by reduction of
    Si0.75Ge0.25O2/Si0.75Ge0.25 using various H-2 pressures," Journal of Applied Physics, 93 12 (2003).

 

  • D. K.
    Sparacin, K. Wada and L. C. Kimerling, "Oxidation kinetics of waveguide
    roughness minimization in silicon microphotonics," OSA Trends in Optics
    and Photonics, ITuC4 (2003).

 

  • S. Saini, J.
    Michel and L. C. Kimerling, "Index contrast scaling for optical
    amplifiers," Journal of Lightwave
    Technology, 21 10 (2003).

 

  • L. C.
    Kimerling, "Silicon microphotonics: The next killer technology," Towards the First Silicon Laser, 93 (2003).

 

  • Z. Jun-Fei,
    F. H. Robertson, E. Mohammad, I. Young, D. Ahn, K. Wada, J. Michel and L. C.
    Kimerling, "On-chip optical clocking signal distribution," OSA Trends
    in Optics and Photonics Series, OWB3 (2003).

 

  • Y. Ishikawa,
    K. Wada, D. D. Cannon, J. F. Liu, H. C. Luan and L. C. Kimerling,
    "Strain-induced band gap shrinkage in Ge grown on Si substrate," Appl. Phys. Lett., 82 13 (2003).

 

  • O. Dosunmu,
    M. K. Emsley, D. D. Cannon, B. Ghyselen, L. C. Kimerling and M. S. Unlu,
    "Germanium on double-SOI photodetectors for 1550 nm operation," 2003 Ieee Leos Annual Meeting Conference
    Proceedings, Vols 1 and 2, (2003).

 

 

  • D. D.
    Cannon, S. Jongthammanurak, J. F. Liu, D. T. Danielson, K. Wada, J. Michel and
    L. C. Kimerling, "Near-infrared Ge photodetectors fabricated on Si
    substrates with CMOS technology," Optoelectronics
    of Group-Iv-Based Materials, 770 (2003).

 

  • L. V. C.
    Assali, F. Gan, L. C. Kimerling and J. F. Justo, "Electronic structure of
    light emitting centers in Er doped Si," Applied Physics a-Materials Science & Processing, 76 6 (2003).

 

  • S. Zhao, J.
    F. Justo, L. V. C. Assali and L. C. Kimerling, "Structure and bonding of
    iron-acceptor pairs in silicon," Brazilian
    Journal of Physics, 32 2 (2002).

 

  • Y. S. Yi, P.
    Bermel, K. Wada, X. M. Duan, J. D. Joannopoulos and L. C. Kimerling, "Low
    voltage tunable one dimensional photonic crystal with large air defects," Materials and Devices for Optoelectronics
    and Microphotonics, 722 (2002).

 

  • Y. Yi, P.
    Bermel, K. Wada, X. M. Duan, J. D. Joannopoulos and L. C. Kimerling,
    "Tunable multichannel optical filter based on silicon photonic band gap
    materials actuation," Applied
    Physics Letters, 81 22 (2002).

 

 

  • S. Saini, K.
    Chen, X. Duan, J. Michel, K. Wada, L. C. Kimerling and M. Lipson, "Design
    for high gain in waveguide amplifiers," OSA Trends in Optics and
    Photonics, IFG3 (2002).

 

  • L. C.
    Kimerling, Mitsui Interbusiness Research Institute. and Massachusetts Institute
    of Technology. Materials Processing Center., "Nonotekunoroji rodomappu :
    zairyo, purosesu to sono oyo: koenkai = A nanotechnology roadmap : materials,
    process and application : [lecture]," [Tokyo], Mitsui gyosai kenkyujo
    shakaibukai MIT kai, 2002.

 

  • F. Gan, M.
    H. Wu, L. C. Kimerling, Society of Photo-optical Instrumentation Engineers.,
    Zhongguo guang xue xue hui., Shanghai jiao tong da xue. and Guo jia zi ran ke
    xue ji jin wei yuan hui (China), "Materials, devices and systems for
    display and lighting : 15-17 October 2002, Shanghai, China," Bellingham,
    Wash., USA, SPIE, 2002.

 

  • H. P. Zheng,
    X. P. Jiang, I. Lee, K. M. Chen, L. C. Kimerling, M. F. Rubner and P. T.
    Hammond, "Close packed particle assemblies on patterned polyelectrolyte
    multilayer films," Abstracts of
    Papers of the American Chemical Society, 221 (2001).

 

  • S. Zhao, L.
    V. C. Assali, J. F. Justo, G. H. Gilmer and L. C. Kimerling,
    "Iron-acceptor pairs in silicon: Structure and formation processes," Journal of Applied Physics, 90 6 (2001).

 

  • A. J. Reddy,
    J. Michel and L. C. Kimerling, "Observation of two coupled defect levels on
    the hydrogen-passivated Si (100) surface," Physica B-Condensed Matter, 308
    (2001).

 

  • G. Masini,
    L. Colace, G. Assanto, H. C. Luan and L. C. Kimerling, "High-performance
    p-i-n Ge on Si photodetectors for the near infrared: From model to
    demonstration," Ieee Transactions on
    Electron Devices, 48 6 (2001).

 

  • H. C. Luan,
    K. Wada, L. C. Kimerling, G. Masini, L. Colace and G. Assanto, "High
    efficiency photodetectors based on high quality epitaxial germanium grown on
    silicon substrates," Optical
    Materials, 17 1-2 (2001).

 

 

 

  • M. Lipson
    and L. C. Kimerling, "Strong Er3+-photon interaction," Optical Materials, 16 1-2 (2001).

 

  • M. Lipson,
    T. Chen, K. Chen, X. Duan and L. C. Kimerling, "Erbium in Si-based light
    confining structures," Materials
    Science and Engineering B-Solid State Materials for Advanced Technology, 81 1-3 (2001).

 

  • K. K. Lee,
    D. R. Lim, L. C. Kimerling, J. Shin and F. Cerrina, "Fabrication of
    ultralow-loss Si/SiO2 waveguides by roughness reduction," Optics Letters, 26 23 (2001).

 

  • K. E. Lee,
    D. R. Lim, L. C. Kimerling and J. Shin, "Ultra Low Loss High Index
    Difference Waveguides," Integrated Photonics Research, OSA Trends in
    Optics and Photonics Series, IMG2 (2001).

 

  • Lee, H. P.
    Zheng, M. Rubner, L. C. Kimerling and P. T. Hammond, "2-D colloidal arrays
    on surfaces using patterned polyelectrolyte multilayers," Abstracts of Papers of the American Chemical
    Society, 222 (2001).

 

  • Lee, X. P.
    Jiang, H. P. Zheng, K. M. Chen, M. F. Rubner, L. C. Kimerling and P. T.
    Hammond, "Periodic patterning of colloidal particles via surface pattern
    matching," Abstracts of Papers of
    the American Chemical Society, 221 (2001).

 

  • P.
    Kopperschmidt, H. C. Luan and L. C. Kimerling, "Recent developments in
    adhesion-enhanced high-vacuum bonding by in situ plasma surface
    precleaning," Semiconductor Wafer
    Bonding: Science, Technology and Applications V, Proceedings, 99 35 (2001).

 

  • P.
    Kopperschmidt and L. C. Kimerling, "Model of a two-dimensional photonic
    bicrystal," Physical Review B, 63 4 (2001).

 

  • X. P. Jiang,
    K. Chen, H. P. Zheng, I. Lee, M. Rubner, L. Kimerling and P. T. Hammond,
    "Selective self-organization of colloids on patterned polyelectrolyte
    templates," Abstracts of Papers of
    the American Chemical Society, 221 (2001).

 

  • L. M.
    Giovane, H. C. Luan, A. M. Agarwal and L. C. Kimerling, "Correlation
    between leakage current density and threading dislocation density in SiGe p-i-n
    diodes grown on relaxed graded buffer layers," Appl. Phys. Lett., 78 4
    (2001).

 

  • V. V.
    Emtsev, D. S. Poloskin, E. I. Shek, N. A. Sobolev and L. C. Kimerling,
    "Effects of oxygen coimplantation on the formation of donor centers in
    erbium-implanted silicon," Materials
    Science and Engineering B-Solid State Materials for Advanced Technology, 81 1-3 (2001).

 

 

  • N. Toyoda,
    K. K. Lee, H. C. Luan, D. R. Lim, A. M. Agarwal, K. Wada, L. C. Kimerling, L.
    P. Allen, D. B. Fenner and A. R. Kirkpatrick, "Surface smoothing of
    polycrystalline Si waveguides with gas-cluster ion beams," Thin Films for Optical Waveguide Devices and
    Materials for Optical Limiting, 597 (2000).

 

  • A. L. Smith,
    K. Wada and L. C. Kimerling, "Modeling of transition metal redistribution
    to enable wafer design for gettering," Journal
    of the Electrochemical Society, 147 3
    (2000).

 

  • J. Reddy, J.
    Michel, B. Parekh, J. H. Shyu and L. C. Kimerling, "In situ detection of
    trace levels of copper in hydrofluoric acid," Journal of the Electrochemical Society, 147 6 (2000).

 

  • R. T. Mo, T.
    A. Burr, G. T. Merklin, F. Machuca, P. A. Pianetta, L. C. Kimerling, R. P.
    Chiarello and C. E. D. Chidsey, "Atomic-scale mechanistic study of
    iodine/alcohol passivated Si(100)," Cleaning
    Technology in Semiconductor Device Manufacturing, 99 36 (2000).

 

 

  • G. Masini,
    L. Colace, G. Assanto, H. C. Luan and L. C. Kimerling, "Germanium on
    silicon pin photodiodes for the near infrared," Electronics Letters, 36 25
    (2000).

 

  • H. C. Luan,
    D. R. Lim, L. Colace, G. Masini, G. Assanto, K. Wada and L. C. Kimerling,
    "Germanium photodetectors for silicon microphotonics by direct epitaxy on
    silicon," Infrared Applications of
    Semiconductors Iii, 607 (2000).

 

  • E. Little,
    J. P. Laine, D. R. Lim, H. A. Haus, L. C. Kimerling and S. T. Chu,
    "Pedestal antiresonant reflecting waveguides for robust coupling to
    microsphere resonators and for microphotonic circuits," Optics Letters, 25 1 (2000).

 

  • M. Lipson
    and L. C. Kimerling, "Er3+ in strong light-confining microcavity," Appl. Phys. Lett., 77 8 (2000).

 

  • M. Lipson,
    T. D. Chen, D. R. Lim, A. Luan, A. Agarwal, J. Michel, K. Wada and L. C.
    Kimerling, "Er3+-photon interaction," Journal of Luminescence, 87-9
    (2000).

 

  • Liao, D. R.
    Lim, A. M. Agarwal, X. M. Duan, K. K. Lee and L. C. Kimerling, "Optical
    transmission losses in polycrystalline silicon strip waveguides: Effects of
    waveguide dimensions, thermal treatment, hydrogen passivation and
    wavelength," Journal of Electronic
    Materials, 29 12 (2000).

 

  • K. Lee, D.
    R. Lim, H. C. Luan, A. M. Agarwal, J. S. Foresi and L. C. Kimerling, "The
    experimental and theoretical study of scattering losses in Si/SiO2
    waveguides," Integrated Photonics
    Research, Technical Digest, 45 (2000).

 

  • K. Lee, D.
    R. Lim, H. C. Luan, A. Agarwal, J. Foresi and L. C. Kimerling, "Effect of
    size and roughness on light transmission in a Si/SiO2 waveguide: Experiments
    and model," Appl. Phys. Lett.,
    77 11 (2000).

 

  • J. P. Laine,
    B. E. Little, D. R. Lim, H. C. Tapalian, L. C. Kimerling and H. A. Haus,
    "Planar integrated wavelength-drop device based on pedestal antiresonant
    reflecting waveguides and high-Q silica microspheres," Optics Letters, 25 22 (2000).

 

  • J. P. Laine,
    B. E. Little, D. R. Lim, H. C. Tapalian, L. C. Kimerling and H. A. Haus,
    "Microsphere resonator mode characterization by pedestal anti-resonant
    reflecting waveguide coupler," Ieee
    Photonics Technology Letters, 12 8
    (2000).

 

 

  • C.
    Kimerling, "Silicon microphotonics," Applied Surface Science, 159
    (2000).

 

  • Kevin, R. L.
    Desmond, L. Hsin-Chiao, M. A. Agarwalradha, S. F. James and L. C. Kimerling, "The
    experimental and theoretical study of scattering losses in SI/SIO2
    waveguides," Integrated Photonics Research, IThF3 (2000).

 

  • T.
    Gregorkiewicz, D. T. X. Thao, J. M. Langer, H. H. P. T. Bekman, M. S. Bresler,
    J. Michel and L. C. Kimerling, "Energy transfer between shallow centers
    and rare-earth ion cores: Er3+ ion in silicon," Physical Review B, 61 8
    (2000).

 

  • L. M.
    Giovane, H. C. Luan, E. A. Fitzgerald and L. C. Kimerling, "Strained SiGe
    materials for high quantum efficiency photodiodes at lambda=1.3 to 1.5 mu
    m," Infrared Applications of
    Semiconductors Iii, 607 (2000).

 

  • L. Colace,
    G. Masini, G. Assanto, H. C. Luan, K. Wada and L. C. Kimerling, "Efficient
    high-speed near-infrared Ge photodetectors integrated on Si substrates," Appl. Phys. Lett., 76 10 (2000).

 

  • T. D. Chen,
    A. M. Agarwal, A. Thilderkvist, C. Michel and L. C. Kimerling, "Er-doped
    polycrystalline silicon for light emission at gimel=1.54 mu m," Journal of Electronic Materials, 29 7 (2000).

 

  • K. M. Chen,
    A. W. Sparks, H. C. Luan, D. R. Lim, K. Wada and L. C. Kimerling, "An
    omnidirectional reflector and microcavity resonator via the sol-gel
    method," Thin Films for Optical
    Waveguide Devices and Materials for Optical Limiting, 597 (2000).

 

  • K. M. Chen,
    X. P. Jiang, L. C. Kimerling and P. T. Hammond, "Selective
    self-organization of colloids on patterned polyelectrolyte templates," Langmuir, 16 20 (2000).