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Spotlight: Si-CMOS compatible materials and devices for mid-IR microphotonics

Analysis of Threshold Current Behavior for Bulk and Quantum-Well Germanium Laser Structures

Single-Crystal Germanium Growth on Amorphous Silicon

Photonic crystal structures for light trapping in thin-film Si solar cells: Modeling, process and optimizations

Engineering broadband and anisotropic photoluminescence emission from rare earth doped tellurite thin film photonic crystals

U. S. Patents
(listed chronologically — most recently granted first):

L. C. Kimerling, C. A. Ross, L. Bi, P. Jiang, J. Hu, D. H. Kim, G. F. Dionne
Patterned non-reciprocal optical resonator (US Patent 8837877)

L.C. Kimerling, H. Atwater, M. L. Brongersma, L. Dal Negro, T. L. Koch, P. Fauchet, M. Lipson, J. Michel, C. A. Barrios
Electrically pumped extrinsic semiconductor optical amplifier with slot waveguide (US Patent 8619358)

L.C. Kimerling, J. Liu, J. Michel
Engineering emission wavelengths in laser and light emitting devices (US Patent 8242480)

J. Wang, J. Hu, A.M. Agarwal, X. Sun, L.C. Kimerling
Cavity-enhanced multispectral photonic devices (US Patent 8203155)

D. Pan, J. Liu, J. Michel, L.C. Kimerling
High speed and low loss GeSi/Si electro-absorption light modulator and method of fabrication using selective growth (US Patent 8160404)

J. Hu, A. Agarwal, L. C. Kimerling
Photoconductors for mid-/far-IR detection (US Patent 8115203)

Y. Miyachi, W. P. Giziewicz, J. Michel, L. C. Kimerling
Photodetector and manufacturing method thereof (US Patent 8022494)

J. Hu, N.-N. Feng, A. M. Agarwal, L. C. Kimerling
Thermo-optic infrared pixel and focal plane array (US Patent 7872233)

D. Pan, J. Liu, L. C. Kimerling, J. F. Mcmillan, M. D. Sockin, C. W. Wong
Ultrafast Ge/Si resonator-based modulators for optical data communications in silicon photonics (US Patent 7840099)

D. K. Sparacin, A. M. Agarwal, P. K. Roy, L. C. Kimerling
Microphotonic waveguide including core/cladding interface layer (US Patent 7831123)

D. Pan, J. Liu, J. Michel, J. Yasaitis, L. C. Kimerling
Method of fabricating Ge or SiGe/Si waveguide or photonic crystal structures by selective growth (US Patent 7801406)

L. C. Kimerling, K. Wada, D. K. Sparacin, D. R. Lim
On-chip optical amplifier (US Patent 7787176)

L. D. Negro, J. H. Yi, L. C. Kimerling
Energy coupled superlattice structures for silicon based lasers and modulators (US Patent 7738756)

K. Wada, L. C. Kimerling
Ge photodetectors (US Patent 7723754)

Y. Miyachi, W. P. Giziewicz, J. Michel, L. C. Kimerling
Photodiode (US Patent 7723206)

J.-F. Zheng, Jun-fei, K. Wada, J. Michel, D. Ahn, L. C. Kimerling
Optical grating coupler (US Patent 7715676)

Y. Miyachi, W. P. Giziewicz, J. Michel, L. C. Kimerling
Photodiode (US Patent 7659627)

D. Pan, J. Michel, E. H. Sargent, W. P. Giziewicz, L. C. Kimerling
Bidirectional transceiver assembly for POF application (US Patent 7606499)

J. Hu, A. M. Agarwal, L. C. Kimerling
Planar MID-IR integrated microphotonics (US Patent 7599584)

J. Liu, D. Pan, L. C. Kimerling, J. Michel, S. Saini
Method and structure of germanium laser on silicon (US Patent 7596158)

J. F. Viens, A. M. Agarwal, L. C. Kimerling
Multi-spectral pixel and focal plane array (US Patent 7566942)

N.-N. Feng, R. Sun, L. C. Kimerling, J. Michel
Mode transformers for low index high confinement waveguides (US Patent 7565046)

Y. Yi, L. C. Kimerling, X. Duan, L. Zeng
Light trapping in thin film solar cells using textured photonic crystal (US Patent 7482532)

S. Saini, J. Michel, D. Pan, W. Giziewicz, L. C. Kimerling
Partial confinement photonic crystal waveguides (US Patent 7480430)

A. M. Agarwal, J. Hu, L. C. Kimerling
CHG ring resonators (US Patent 7447410)

E. L. Haus (Legal Representative), M. Popovic, M. R. Watts, C. W. Wong, L. C. Kimerling
Hitless switch for high-density integrated optics (US Patent 7424181)

J. Hu, A. M. Agarwal, L. C. Kimerling
Ultra-high-Q surface-tension-induced monolithically integrated on-chip resonator and associated devices (US Patent 7415058)

L. D. Negro, J. H. Yi, J. Michel, Y. Yi, V. T. Nguyen, L. C. Kimerling
CMOS-compatible light emitting aperiodic photonic structures (US Patent 7407896)

N.-N. Feng, J. Michel, L. C. Kimerling
Optical field concentrator using multiple low-index nano-layer configuration for CMOS compatible laser devices (US Patent 7352942)

D. R. Lim, C. Manolatou, P. Maki, K. K. Lee, K. Wada, H. A. Haus, L. C. Kimerling
Three dimensional high index optical waveguides bends and splitters (US Patent 7352934)

L. C. Kimerling, D. R. Lim
Grating into a high index contrast strip or channel waveguide (US Patent 7346238)

D. K. Sparacin, L. D. Negro, S. Saini, L. C. Kimerling
Planar multiwavelength optical power supply on a silicon platform (US Patent 7336684)

S. Akiyama, X. Duan, L. C. Kimerling, Y. Yi
Silicon based on-chip photonic band gap cladding waveguide (US Patent 7321713)

S. Akiyama, L. C. Kimerling, K. Wada, Kazumi
Photonic bandgap modulator, amplifier, demux, and TDM devices (US Patent 7310454)

D. Ahn, J. Liu, J. Michel, L. C. Kimerling
Vertically-integrated waveguide photodetector apparatus and related coupling methods (US Patent 7305157)

D. Ahn, J. Liu, J. Michel, L. C. Kimerling
Integrated waveguide photodetector apparatus with matching propagation constants and related coupling methods (US Patent 7266263)

L. C. Kimerling, K. Wada, D. D. Cannon, K. K. Lee
Light modulation using the Franz-Keldysh effect (US Patent 7239762)

D. R. Lim, K. Wada, L. C. Kimerling
Thermally and electrically conducting high index contrast multi-layer mirrors and devices (US Patent 7238412)

L. S. S. Loo, M. Lipson, K. K. Gleason, L. C. Kimerling
Air gaps for optical applications (US Patent 7227678)

J. Lock, L. C. Kimerling, K. K. Gleason
Polysilane thin films for directly patternable waveguides (US Patent 7190871)

J. D. Joannopoulos, S. Fan, M. Lipson, K. M. Chen, L. C. Kimerling
Tunable chromatic dispersion compensation (US Patent 7190853)

J.-F. Zheng, K. Wada, J. Michel, D. Ahn, L. C. Kimerling
Optical grating coupler (US Patent 7146074)

D. K. Sparacin, K. Wada, L. C. Kimerling
Multiple oxidation smoothing method for reducing silicon waveguide roughness (US Patent 7123805)

A. M. Agarwal, L. C. Kimerling, H. A. Haus, K. Wada, S. G. Johnson, C. Manolatou, J. Michel, V. T. Nguyen
Vertically and laterally confined 3D optical coupler (US Patent 7120335)

D. R. Lim, L. C. Kimerling
Methods of altering the resonance of waveguide micro-resonators (US Patent 7092590)

D. R. Lim, L. C. Kimerling
Methods of altering the resonance of waveguide micro-resonators (US Patent 7068862)

J.-F. Zheng, K. Wada, J. Michel, D. Ahn, L. C. Kimerling
Optical grating coupler (US Patent 7065271)

K. Wada, H. A. Haus, L. C. Kimerling
Array waveguide grating (US Patent 7043120)

D. R. Lim, L. C. Kimerling
Monolithic integration of micro-optics circuits and RF circuits (US Patent 7031561)

K. Wada, L. C. Kimerling, Y. Ishikawa, D. D. Cannon, J. Liu
Method of forming GE photodetectors (US Patent 6946318)

L. C. Kimerling, K. Wada, S. Akiyama
Waveguide-to-semiconductor device coupler (US Patent 6944368)

D. R. Lim, L. C. Kimerling
Methods of altering the resonance of waveguide micro-resonators (US Patent 6925226)

L. C. Kimerling
Hybrid integration of electrical and optical chips (US Patent 6859571)

L. C. Kimerling, K. Wada, Y. Yi
Low voltage tunable photonic crystal with large defects as wavelength routing (US Patent 6859321)

K. K. Lee, D. R. Lim, K. Wada, L. C. Kimerling
Low-loss waveguide and method of making same (US Patent 6850683)

K. M. Chen, L. C. Kimerling
Room temperature luminescent Erbium Oxide thin films for photonics (US Patent 6846509)

K. Wada, L. C. Kimerling, H. A. Haus
Interleavers for AWGs (US Patent 6832027)

K. Wada, L. C. Kimerling, Y. Ishikawa, D. D. Cannon, J. Liu
Ge photodetectors (US Patent 6812495)

D. R. Lim, K. K. Lee, L. C. Kimerling
Methods of altering the resonance of waveguide micro-resonators (US Patent 6751368)

K. Wada, L. C. Kimerling, N. Toyoda
Back reflector of solar cells (US Patent 6750393)

K. Wada, L. C. Kimerling
Silicon solar cell with germanium backside solar cell (US Patent 6743974)

K. K. Lee, K. Wada, D. Lim, L. C. Kimerling
Mode transformer between low index difference waveguide and high index difference waveguide (US Patent 6697551)

K. K. Lee, D. Lim, K. Wada, L. C. Kimerling
Graded index waveguide (US Patent 690871)

M. Lipson, L. C. Kimerling
All optical switch for optical integrated circuits (US Patent 6684003)

D. R. Lim, A. Agarwal, L. C. Kimerling
Optical micro-cavity sensors (US Patent 6661938)

H.-C. Luan, L. C. Kimerling
Cyclic thermal anneal for dislocation reduction (US Patent 6635110)

K. K. Lee, K. Wada, D. Lim, L. C. Kimerling
Mode coupler between low index difference waveguide and high index difference waveguide (US Patent 6631225)

M. Lipson, L. C. Kimerling
Resonant microcavities (US Patent 6627923)

S. Fan, J. D. Joannopoulos, G. B. Kenney, M. Lipson, K. M. Chen, L. C. Kimerling
Thin film filters using omnidirectional reflectors (US Patent 6624945)

L. C. Kimerling, K. Wada, H. A. Haus, M. Popovic, S. Akiyama
Optical waveguides with trench structures (US Patent 6621972)

M. Lipson, L. C. Kimerling
Microcavity amplifiers (US Patent 6567209)

H.-C. Luan, L. C. Kimerling
Oxidation of silicon on germanium (US Patent 6352942)

J. S. Foresi, A. M. Agarwal, M. R. Black, D. M. Koker, L. C. Kimerling
Optoelectronic integrated circuits formed of polycrystalline semiconductor waveguide (US Patent 6108464)

G. S. Higashi, M.-F. Hong, L. C. Kimerling, Y. Ma
Method of integrated circuit fabrication (US Patent 6013556)

J. S. Foresi, A. M. Agarwal, M. R. Black, D. M. Koker, L. C. Kimerling
Methods of forming polycrystalline semiconductor waveguides for optoelectronic integrated circuits, and devices formed thereby (US Patent 5841931)

J. L. Benton, D. C. Jacobson, L. C. Kimerling, J. Michel, J. M. Poate
Optical waveguide system comprising a rare-earth Si-based optical device (US Patent 5107538)

H. S. Chen, G. S. Indig, L. C. Kimerling
Method of making a superconducting oxide comprising contacting a melt with an oxygen-containing atmosphere (US Patent 5100870)

K. A. Jackson, L. C. Kimerling
Solidification of molten materials (US Patent 4394183)

J. L. Benton, C. J. Doherty, L. C. Kimerling, H. J. Leamy
Passivation of defects in laser annealed semiconductors (US Patent 4266986)

K. A. Jackson, L. C. Kimerling, H. J. Leamy
Photo-induced temperature gradient zone melting (US Patent 4257824)

L. C. Kimerling, H. J. Leamy, G. E. Smith
Healing radiation defects in semiconductors (US Patent 4238694)

G. K. Celler, L. C. Kimerling, H. J. Leamy, J. M. Poate, G. A. Rozgonyi
Patterned epitaxial regrowth using overlapping pulsed irradiation (US Patent 4234358)

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