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EMAT U.S. Patents


Select Recent Publications


Spotlight: Si-CMOS compatible materials and devices for mid-IR microphotonics

Analysis of Threshold Current Behavior for Bulk and Quantum-Well Germanium Laser Structures

Single-Crystal Germanium Growth on Amorphous Silicon

Photonic crystal structures for light trapping in thin-film Si solar cells: Modeling, process and optimizations

Engineering broadband and anisotropic photoluminescence emission from rare earth doped tellurite thin film photonic crystals

U. S. Patents
(listed chronologically — most recently granted first):

P. T. Lin, Y. Cai, A. M. Agarwal, L. C. Kimerling
Methods and apparatus for mid-infrared sensing (US Patent 9,046,650)

L. C. Kimerling, C. A. Ross, L. Bi, P. Jiang, J. Hu, D. H. Kim, G. F. Dionne
Patterned non-reciprocal optical resonator (US Patent 8,837,877)

L.C. Kimerling, H. Atwater, M. L. Brongersma, L. Dal Negro, T. L. Koch, P. Fauchet, M. Lipson, J. Michel, C. A. Barrios
Electrically pumped extrinsic semiconductor optical amplifier with slot waveguide (US Patent 8,619,358)

L.C. Kimerling, J. Liu, J. Michel
Engineering emission wavelengths in laser and light emitting devices (US Patent 8,242,480)

J. Wang, J. Hu, A.M. Agarwal, X. Sun, L.C. Kimerling
Cavity-enhanced multispectral photonic devices (US Patent 8,203,155)

D. Pan, J. Liu, J. Michel, L.C. Kimerling
High speed and low loss GeSi/Si electro-absorption light modulator and method of fabrication using selective growth (US Patent 8,160,404)

J. Hu, A. Agarwal, L. C. Kimerling
Photoconductors for mid-/far-IR detection (US Patent 8,115,203)

Y. Miyachi, W. P. Giziewicz, J. Michel, L. C. Kimerling
Photodetector and manufacturing method thereof (US Patent 8,022,494)

J. Hu, N.-N. Feng, A. M. Agarwal, L. C. Kimerling
Thermo-optic infrared pixel and focal plane array (US Patent 7,872,233)

D. Pan, J. Liu, L. C. Kimerling, J. F. Mcmillan, M. D. Sockin, C. W. Wong
Ultrafast Ge/Si resonator-based modulators for optical data communications in silicon photonics (US Patent 7,840,099)

D. K. Sparacin, A. M. Agarwal, P. K. Roy, L. C. Kimerling
Microphotonic waveguide including core/cladding interface layer (US Patent 7,831,123)

D. Pan, J. Liu, J. Michel, J. Yasaitis, L. C. Kimerling
Method of fabricating Ge or SiGe/Si waveguide or photonic crystal structures by selective growth (US Patent 7,801,406)

L. C. Kimerling, K. Wada, D. K. Sparacin, D. R. Lim
On-chip optical amplifier (US Patent 7,787,176)

L. D. Negro, J. H. Yi, L. C. Kimerling
Energy coupled superlattice structures for silicon based lasers and modulators (US Patent 7,738,756)

K. Wada, L. C. Kimerling
Ge photodetectors (US Patent 7,723,754)

Y. Miyachi, W. P. Giziewicz, J. Michel, L. C. Kimerling
Photodiode (US Patent 7,723,206)

J.-F. Zheng, Jun-fei, K. Wada, J. Michel, D. Ahn, L. C. Kimerling
Optical grating coupler (US Patent 7,715,676)

Y. Miyachi, W. P. Giziewicz, J. Michel, L. C. Kimerling
Photodiode (US Patent 7,659,627)

D. Pan, J. Michel, E. H. Sargent, W. P. Giziewicz, L. C. Kimerling
Bidirectional transceiver assembly for POF application (US Patent 7,606,499)

J. Hu, A. M. Agarwal, L. C. Kimerling
Planar MID-IR integrated microphotonics (US Patent 7,599,584)

J. Liu, D. Pan, L. C. Kimerling, J. Michel, S. Saini
Method and structure of germanium laser on silicon (US Patent 7,596,158)

J. F. Viens, A. M. Agarwal, L. C. Kimerling
Multi-spectral pixel and focal plane array (US Patent 7,566,942)

N.-N. Feng, R. Sun, L. C. Kimerling, J. Michel
Mode transformers for low index high confinement waveguides (US Patent 7,565,046)

Y. Yi, L. C. Kimerling, X. Duan, L. Zeng
Light trapping in thin film solar cells using textured photonic crystal (US Patent 7,482,532)

S. Saini, J. Michel, D. Pan, W. Giziewicz, L. C. Kimerling
Partial confinement photonic crystal waveguides (US Patent 7,480,430)

A. M. Agarwal, J. Hu, L. C. Kimerling
CHG ring resonators (US Patent 7,447,410)

E. L. Haus (Legal Representative), M. Popovic, M. R. Watts, C. W. Wong, L. C. Kimerling
Hitless switch for high-density integrated optics (US Patent 7,424,181)

J. Hu, A. M. Agarwal, L. C. Kimerling
Ultra-high-Q surface-tension-induced monolithically integrated on-chip resonator and associated devices (US Patent 7,415,058)

L. D. Negro, J. H. Yi, J. Michel, Y. Yi, V. T. Nguyen, L. C. Kimerling
CMOS-compatible light emitting aperiodic photonic structures (US Patent 7,407,896)

N.-N. Feng, J. Michel, L. C. Kimerling
Optical field concentrator using multiple low-index nano-layer configuration for CMOS compatible laser devices (US Patent 7,352,942)

D. R. Lim, C. Manolatou, P. Maki, K. K. Lee, K. Wada, H. A. Haus, L. C. Kimerling
Three dimensional high index optical waveguides bends and splitters (US Patent 7,352,934)

L. C. Kimerling, D. R. Lim
Grating into a high index contrast strip or channel waveguide (US Patent 7,346,238)

D. K. Sparacin, L. D. Negro, S. Saini, L. C. Kimerling
Planar multiwavelength optical power supply on a silicon platform (US Patent 7,336,684)

S. Akiyama, X. Duan, L. C. Kimerling, Y. Yi
Silicon based on-chip photonic band gap cladding waveguide (US Patent 7,321,713)

S. Akiyama, L. C. Kimerling, K. Wada, Kazumi
Photonic bandgap modulator, amplifier, demux, and TDM devices (US Patent 7,310,454)

D. Ahn, J. Liu, J. Michel, L. C. Kimerling
Vertically-integrated waveguide photodetector apparatus and related coupling methods (US Patent 7,305,157)

D. Ahn, J. Liu, J. Michel, L. C. Kimerling
Integrated waveguide photodetector apparatus with matching propagation constants and related coupling methods (US Patent 7,266,263)

L. C. Kimerling, K. Wada, D. D. Cannon, K. K. Lee
Light modulation using the Franz-Keldysh effect (US Patent 7,239,762)

D. R. Lim, K. Wada, L. C. Kimerling
Thermally and electrically conducting high index contrast multi-layer mirrors and devices (US Patent 7,238,412)

L. S. S. Loo, M. Lipson, K. K. Gleason, L. C. Kimerling
Air gaps for optical applications (US Patent 7,227,678)

J. Lock, L. C. Kimerling, K. K. Gleason
Polysilane thin films for directly patternable waveguides (US Patent 7,190,871)

J. D. Joannopoulos, S. Fan, M. Lipson, K. M. Chen, L. C. Kimerling
Tunable chromatic dispersion compensation (US Patent 7,190,853)

J.-F. Zheng, K. Wada, J. Michel, D. Ahn, L. C. Kimerling
Optical grating coupler (US Patent 7,146,074)

D. K. Sparacin, K. Wada, L. C. Kimerling
Multiple oxidation smoothing method for reducing silicon waveguide roughness (US Patent 7,123,805)

A. M. Agarwal, L. C. Kimerling, H. A. Haus, K. Wada, S. G. Johnson, C. Manolatou, J. Michel, V. T. Nguyen
Vertically and laterally confined 3D optical coupler (US Patent 7,120,335)

D. R. Lim, L. C. Kimerling
Methods of altering the resonance of waveguide micro-resonators (US Patent 7,092,590)

D. R. Lim, L. C. Kimerling
Methods of altering the resonance of waveguide micro-resonators (US Patent 7,068,862)

J.-F. Zheng, K. Wada, J. Michel, D. Ahn, L. C. Kimerling
Optical grating coupler (US Patent 7,065,271)

K. Wada, H. A. Haus, L. C. Kimerling
Array waveguide grating (US Patent 7,043,120)

D. R. Lim, L. C. Kimerling
Monolithic integration of micro-optics circuits and RF circuits (US Patent 7,031,561)

K. Wada, L. C. Kimerling, Y. Ishikawa, D. D. Cannon, J. Liu
Method of forming GE photodetectors (US Patent 6,946,318)

L. C. Kimerling, K. Wada, S. Akiyama
Waveguide-to-semiconductor device coupler (US Patent 6,944,368)

D. R. Lim, L. C. Kimerling
Methods of altering the resonance of waveguide micro-resonators (US Patent 6,925,226)

L. C. Kimerling
Hybrid integration of electrical and optical chips (US Patent 6,859,571)

L. C. Kimerling, K. Wada, Y. Yi
Low voltage tunable photonic crystal with large defects as wavelength routing (US Patent 6,859,321)

K. K. Lee, D. R. Lim, K. Wada, L. C. Kimerling
Low-loss waveguide and method of making same (US Patent 6,850,683)

K. M. Chen, L. C. Kimerling
Room temperature luminescent Erbium Oxide thin films for photonics (US Patent 6,846,509)

K. Wada, L. C. Kimerling, H. A. Haus
Interleavers for AWGs (US Patent 6,832,027)

K. Wada, L. C. Kimerling, Y. Ishikawa, D. D. Cannon, J. Liu
Ge photodetectors (US Patent 6,812,495)

D. R. Lim, K. K. Lee, L. C. Kimerling
Methods of altering the resonance of waveguide micro-resonators (US Patent 6,751,368)

K. Wada, L. C. Kimerling, N. Toyoda
Back reflector of solar cells (US Patent 6,750,393)

K. Wada, L. C. Kimerling
Silicon solar cell with germanium backside solar cell (US Patent 6,743,974)

K. K. Lee, K. Wada, D. Lim, L. C. Kimerling
Mode transformer between low index difference waveguide and high index difference waveguide (US Patent 6,697,551)

K. K. Lee, D. Lim, K. Wada, L. C. Kimerling
Graded index waveguide (US Patent 6,690,871)

M. Lipson, L. C. Kimerling
All optical switch for optical integrated circuits (US Patent 6,684,003)

D. R. Lim, A. Agarwal, L. C. Kimerling
Optical micro-cavity sensors (US Patent 6,661,938)

H.-C. Luan, L. C. Kimerling
Cyclic thermal anneal for dislocation reduction (US Patent 6,635,110)

K. K. Lee, K. Wada, D. Lim, L. C. Kimerling
Mode coupler between low index difference waveguide and high index difference waveguide (US Patent 6,631,225)

M. Lipson, L. C. Kimerling
Resonant microcavities (US Patent 6,627,923)

S. Fan, J. D. Joannopoulos, G. B. Kenney, M. Lipson, K. M. Chen, L. C. Kimerling
Thin film filters using omnidirectional reflectors (US Patent 6,624,945)

L. C. Kimerling, K. Wada, H. A. Haus, M. Popovic, S. Akiyama
Optical waveguides with trench structures (US Patent 6,621,972)

M. Lipson, L. C. Kimerling
Microcavity amplifiers (US Patent 6,567,209)

H.-C. Luan, L. C. Kimerling
Oxidation of silicon on germanium (US Patent 6,352,942)

J. S. Foresi, A. M. Agarwal, M. R. Black, D. M. Koker, L. C. Kimerling
Optoelectronic integrated circuits formed of polycrystalline semiconductor waveguide (US Patent 6,108,464)

G. S. Higashi, M.-F. Hong, L. C. Kimerling, Y. Ma
Method of integrated circuit fabrication (US Patent 6,013,556)

J. S. Foresi, A. M. Agarwal, M. R. Black, D. M. Koker, L. C. Kimerling
Methods of forming polycrystalline semiconductor waveguides for optoelectronic integrated circuits, and devices formed thereby (US Patent 5,841,931)

J. L. Benton, D. C. Jacobson, L. C. Kimerling, J. Michel, J. M. Poate
Optical waveguide system comprising a rare-earth Si-based optical device (US Patent 5,107,538)

H. S. Chen, G. S. Indig, L. C. Kimerling
Method of making a superconducting oxide comprising contacting a melt with an oxygen-containing atmosphere (US Patent 5,100,870)

K. A. Jackson, L. C. Kimerling
Solidification of molten materials (US Patent 4,394,183)

J. L. Benton, C. J. Doherty, L. C. Kimerling, H. J. Leamy
Passivation of defects in laser annealed semiconductors (US Patent 4,266,986)

K. A. Jackson, L. C. Kimerling, H. J. Leamy
Photo-induced temperature gradient zone melting (US Patent 4,257,824)

L. C. Kimerling, H. J. Leamy, G. E. Smith
Healing radiation defects in semiconductors (US Patent 4,238,694)

G. K. Celler, L. C. Kimerling, H. J. Leamy, J. M. Poate, G. A. Rozgonyi
Patterned epitaxial regrowth using overlapping pulsed irradiation (US Patent 4,234,358)

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